Microstructural and textural characterization in MgO thin film using HRTEM

Title
Microstructural and textural characterization in MgO thin film using HRTEM
Authors
김규현이민석최종서안재평
Keywords
pdp; texture; EELS; columnar structure; Amorphous
Issue Date
2009-05
Publisher
Thin solid films
Citation
VOL 517, 3995-3998
Abstract
The microstructural and texture evolution of MgO protective films deposited on Si and glass substrates by ebeam evaporation were investigated. MgO films on both types of substrates consisted of a well developed columnar structure showing b111N texture in the cross sectional view and a triangle shape in the plane view. It was found that there is amorphous MgO between each columnar, which occupies 8–25% in the MgO films. The electron energy loss spectroscopy (EELS) spectrum of amorphous MgO showed features of chemical states and electronic structures different from those of crystalline MgO.
URI
http://pubs.kist.re.kr/handle/201004/35353
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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