Microstructural and textural characterization in MgO thin film using HRTEM
- Microstructural and textural characterization in MgO thin film using HRTEM
- 김규현; 이민석; 최종서; 안재평
- pdp; texture; EELS; columnar structure; Amorphous
- Issue Date
- Thin solid films
- VOL 517, 3995-3998
- The microstructural and texture evolution of MgO protective films deposited on Si and glass substrates by
ebeam evaporation were investigated. MgO films on both types of substrates consisted of a well developed
columnar structure showing b111N texture in the cross sectional view and a triangle shape in the plane view.
It was found that there is amorphous MgO between each columnar, which occupies 8–25% in the MgO films.
The electron energy loss spectroscopy (EELS) spectrum of amorphous MgO showed features of chemical
states and electronic structures different from those of crystalline MgO.
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