Macro/Micro residual stress analysis of Pb(Zr0.52Ti0.48)O3 Films for piezoelectric microcantilever

Title
Macro/Micro residual stress analysis of Pb(Zr0.52Ti0.48)O3 Films for piezoelectric microcantilever
Authors
이정훈황교선김태송
Issue Date
2009-05
Publisher
International workshop on nanomechanical cantilever sensors
URI
http://pubs.kist.re.kr/handle/201004/35394
Appears in Collections:
KIST Publication > Conference Paper
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