Fabrication of Bismuth Telluride-Based Alloy Thin Film Thermoelectric Devices Grown by Metal Organic Chemical Vapor Deposition

Title
Fabrication of Bismuth Telluride-Based Alloy Thin Film Thermoelectric Devices Grown by Metal Organic Chemical Vapor Deposition
Authors
권성도주병권윤석진김진상
Keywords
Thin film; thermoelectric; generator; Seebeck coefficient; MOCVD; bismuth telluride
Issue Date
2009-07
Publisher
Journal of electronic materials
Citation
VOL 38, NO 7, 920-924
Abstract
Bismuth–antimony–telluride based thin film materials were grown by metal organic vapor phase deposition (MOCVD). A planar-type thermoelectric device was fabricated with p-type Bi0.4Sb1.6Te3 and n-type Bi2Te3 thin films. The generator consisted of 20 pairs of p-type and n-type legs. We demonstrated complex structures of different conduction types of thermoelectric elements on the same substrate using two separate deposition runs of p-type and n-type thermoelectric materials. To demonstrate power generation, we heated one side of the sample with a heating block and measured the voltage output. An estimated power of 1.3 lW was obtained for the temperature difference of 45 K. We provide a promising procedure for fabricating thin film thermoelectric generators by using MOCVD grown thermoelectric materials that may have a nanostructure with high thermoelectric properties.
URI
http://pubs.kist.re.kr/handle/201004/35553
ISSN
0361-5235
Appears in Collections:
KIST Publication > Article
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