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dc.contributor.author이승민-
dc.contributor.author성태연-
dc.contributor.author박종극-
dc.date.accessioned2015-12-02T15:12:14Z-
dc.date.available2015-12-02T15:12:14Z-
dc.date.issued200909-
dc.identifier.other30650-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/35912-
dc.publisherAEPSE2009-
dc.subjecta-Si-
dc.subjectsputtering-
dc.subjectcrystallization-
dc.subjectthin film-
dc.titleCrystallization behavior of amorphous silicon thin film deposited by DC/RF magnetron sputtering with substrate bias-
dc.typeConference Paper-
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