A study of reflectance of textured crystalline Si surface fabricated by using preferential aqueous etching and grinding processes

Title
A study of reflectance of textured crystalline Si surface fabricated by using preferential aqueous etching and grinding processes
Authors
우태기김영환안효석김성일
Keywords
Si solar cells; texturing; grinding; etching
Issue Date
2009-09
Publisher
마이크로전자 및 패키징학회지; Journal of Microelectronics and Packaging Society
Citation
VOL 16, NO 3, 1-5
Abstract
We produced noble surface structure of crystalline Si for solar cells by using preferential aqueous etching on crystallographic defects which were induced by grinding process. We analyzed the reflectance of textured surface according to surface topography resulting from various etchant concentrations and duration of etching process. The crystallographic defects and textured surface topography were investigated by using transmission electron microscopy and secondary electron microscopy, respectively. Also, the measurement of reflectance of textured surface utilizes spectrophotometer. The optimized texture surface exhibits improved result indicating reflectance of below ave.1%. And it is cost-effective as well as taking short time within a few minutes.
URI
http://pubs.kist.re.kr/handle/201004/35926
ISSN
1226-9360
Appears in Collections:
KIST Publication > Article
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