Optical and Electrical Properties of Fluorine-doped Gallium Tin Oxide (GTO:F) Composite Films on PET Prepared by ECR-MOCVD

Title
Optical and Electrical Properties of Fluorine-doped Gallium Tin Oxide (GTO:F) Composite Films on PET Prepared by ECR-MOCVD
Authors
박지훈변동진이중기
Keywords
optical; electrical; ECR-MOCVD; Fluorine-doped gallium tin oixde; GTO:F; PET
Issue Date
2009-09
Publisher
Seven Asian-European International Conference on Plasma Surface Engineering
Abstract
In this paper, preparation of GTO:F films on PET substrate was carry out by using electron cyclotron resonance metallic organic chemical vapor deposition (ECR-MOCVD) method in order to avoid from thermal deformation of the plastic substrate. GTO:F film coating on transparent plastic film is very promising material for the application of flexible electronics.
URI
http://pubs.kist.re.kr/handle/201004/35983
Appears in Collections:
KIST Publication > Conference Paper
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