Preparation of Fluorine Doped Zinc Tin Oxide Coating Layer on SUS 316 Bipolar Plates by ECR-MOCVD for PEMFC

Title
Preparation of Fluorine Doped Zinc Tin Oxide Coating Layer on SUS 316 Bipolar Plates by ECR-MOCVD for PEMFC
Authors
이중기박지훈장원영변동진
Keywords
ECR-MOCVD; PEMFC; Bipolar plate; SUS 316; Zinc-Tin Oxide coating
Issue Date
2009-10
Publisher
ECS transactions
Citation
VOL 25, NO 1, 1731-1734
Abstract
Fluorine-doped zinc tin oxide (ZnSnOx:F) films on SUS316 are prepared by electron cyclotron resonance-metal organic chemical vapor deposition (ECR-MOCVD) in order to achieve the corrosion-resistant and low contact resistance bipolar plates for polymer electrolyte membrane (PEM) fuel cells. The prepared ZnSnOx:F films coated on SUS316 substrate are characterized by X-ray diffraction (XRD), auger electron microscopy (AES) and field emission-scanning electron microscopy (FE-SEM). To simulate the aggressive PEMFC environment, all of the electrochemical experiments are conducted in 1M H2SO4 + 2ppm HF solution at 70℃. The fluorine doping appears to be one of the critical process parameters on the formation of the corrosionprotective layer for PEMFC bipolar plates, as well as affecting the electrical properties of the films.
URI
http://pubs.kist.re.kr/handle/201004/36003
ISSN
1938-5862
Appears in Collections:
KIST Publication > Article
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