Control of abnormal grain inclusions in the nanocrystalline diamond film deposited by hot filament CVD
- Control of abnormal grain inclusions in the nanocrystalline diamond film deposited by hot filament CVD
- Heqing Li; 이학주; 박종극; 백영준; 황규원; 정증현; 이욱성
- Hot filament CVD; Nanocrystalline diamond film; Bias growth
- Issue Date
- Diamond and related materials
- VOL 18, NO 11, 1369-1374
- Formation of abnormal grain inclusions in nanocrystalline diamond films deposited by hot filament CVD
(HFCVD) was investigated. The phenomenon was attributed to two different origins: an intrinsic and an
extrinsic one. The inclusions due to the intrinsic origin could be either avoided or weakened by controlling
chamber pressure, CH4/N2 concentrations in H2, and by positive substrate bias. The extrinsic origin for the
abnormal grains was found to be the contamination from the alumina insulation tubes for the thermocouple
placed near the substrate, which were degraded by the extended exposure to the high temperature and
strongly reducing atmosphere.
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