Control of abnormal grain inclusions in the nanocrystalline diamond film deposited by hot filament CVD

Title
Control of abnormal grain inclusions in the nanocrystalline diamond film deposited by hot filament CVD
Authors
Heqing Li이학주박종극백영준황규원정증현이욱성
Keywords
Hot filament CVD; Nanocrystalline diamond film; Bias growth
Issue Date
2009-11
Publisher
Diamond and related materials
Citation
VOL 18, NO 11, 1369-1374
Abstract
Formation of abnormal grain inclusions in nanocrystalline diamond films deposited by hot filament CVD (HFCVD) was investigated. The phenomenon was attributed to two different origins: an intrinsic and an extrinsic one. The inclusions due to the intrinsic origin could be either avoided or weakened by controlling chamber pressure, CH4/N2 concentrations in H2, and by positive substrate bias. The extrinsic origin for the abnormal grains was found to be the contamination from the alumina insulation tubes for the thermocouple placed near the substrate, which were degraded by the extended exposure to the high temperature and strongly reducing atmosphere.
URI
http://pubs.kist.re.kr/handle/201004/36020
ISSN
0925-9635
Appears in Collections:
KIST Publication > Article
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