Dephenylation of Decaphenylcyclopentasilane with HCl Catalyzed by Aluminum Chloride: Facile Synthetic Route to Cyclopentasilane

Title
Dephenylation of Decaphenylcyclopentasilane with HCl Catalyzed by Aluminum Chloride: Facile Synthetic Route to Cyclopentasilane
Authors
이동원황영애한준수유복렬
Keywords
Silane; Cyclopentasilane; Polysilane; Aluminum chloride; Hydrogen chloride
Issue Date
2009-10
Publisher
Bulletin of the Korean Chemical Society
Citation
VOL 30, NO 10, 2443-2445
Abstract
Hydrosilanes are useful precursors for fabrication of electronic devices such as silicon thin-film transistors. It is now well known that especially monosilane is widely utilized as good precursors in electron industry but their thermal depositions to polysilicon require high temperature and vacuum processes. Recently much attention has been paid to alternative solution processes such as spin coating and inkjet printings, which are very promising to significantly improve fabrication without vacuum process on a large scale. For this solution process, requirements of precursors applicable to solution process are relatively low volatile and soluble in common organic solvents. There are some candidates of liquid phase hydrogenated silicon compounds are either of the cyclic polysilanes forms such as cyclopentasilane and cyclohexasilane or linear-chain. Cyclopentasilane (1), which is a discrete molecule as a liquid phase and soluble in various organic solvents, is the best precursor from the viewpoint of its synthesis and purification, many patents on its application for solution processes have been filed.
URI
http://pubs.kist.re.kr/handle/201004/36088
ISSN
0253-2964
Appears in Collections:
KIST Publication > Article
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