Investigation on the Micro-photoluminescence of ZnO Thin Films Grown by Pulsed Laser Deposition

Title
Investigation on the Micro-photoluminescence of ZnO Thin Films Grown by Pulsed Laser Deposition
Authors
이득희임재현김상식이상렬
Keywords
ZnO; Oxide semiconductor; Thin films; Pulsed laser deposition; Photoluminescence
Issue Date
2009-09
Publisher
전기전자재료학회논문지
Citation
VOL 22, NO 9, 756-759
Abstract
We described the growth of undoped ZnO thin films and their optical properties changing with a various growth temperature. The undoped ZnO thin films were grown on c-Al2O3 substrates using pulsed laser deposition (PLD) at room temperature, 200, 400, and 600oC, respectively. Field emission microscopy (FE-SEM) measurements showed that the grain size of undoped ZnO thin films are increasing as a increase of growth temperature. In addition, we were investigated that the structural and optical properties of undoped ZnO thin films by x-ray diffraction (XRD) and photoluminescence (PL) studied. Also, we could confirmed that the exciton luminescence was strongly related to charge trap by grain boundary of the samples using micro-PL measurement.
URI
http://pubs.kist.re.kr/handle/201004/36170
ISSN
1226-7945
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KIST Publication > Article
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