Optical properties of ZnO nanoparticles embedded in a silicon nitride layer formed by sputtering and thermal treatment
- Optical properties of ZnO nanoparticles embedded in a silicon nitride layer formed by sputtering and thermal treatment
- 오도현; 조운조; 김태환
- Silicon Nitride Layer; Nanoparticle; sputtering; ZnO nanoparticles; Thermal annealing treatment; Optical properties
- Issue Date
- Current applied physics : the official journal of the Korean Physical Society
- VOL 9, e173-e175
- Transmission electron microscopy images of annealed ZnO/silicon nitride (SiNx) multilayer grown on Si
(100) substrates showed that the ZnO nanoparticles were formed inside the SiNx layer. The photoluminescence
(PL) spectrum of a sample consisting of ZnO/SiNx multilayer with a SiNx buffer layer annealed at
800 C showed that only a strong ultraviolet (UV) emission peak around 376 nm, corresponding to the
ZnO nanoparticles, appeared in the visible range. The full width at half maximum of the UV peak of
the PL spectrum was approximately 13 nm indicative of the high-quality of the ZnO nanoparticles. The
optical properties of the ZnO nanoparticles were enhanced with increasing thickness of the deposited
ZnO thin film.
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