Optical properties of ZnO nanoparticles embedded in a silicon nitride layer formed by sputtering and thermal treatment

Title
Optical properties of ZnO nanoparticles embedded in a silicon nitride layer formed by sputtering and thermal treatment
Authors
오도현조운조김태환
Keywords
Silicon Nitride Layer; Nanoparticle; sputtering; ZnO nanoparticles; Thermal annealing treatment; Optical properties
Issue Date
2009-03
Publisher
Current applied physics : the official journal of the Korean Physical Society
Citation
VOL 9, e173-e175
Abstract
Transmission electron microscopy images of annealed ZnO/silicon nitride (SiNx) multilayer grown on Si (100) substrates showed that the ZnO nanoparticles were formed inside the SiNx layer. The photoluminescence (PL) spectrum of a sample consisting of ZnO/SiNx multilayer with a SiNx buffer layer annealed at 800 C showed that only a strong ultraviolet (UV) emission peak around 376 nm, corresponding to the ZnO nanoparticles, appeared in the visible range. The full width at half maximum of the UV peak of the PL spectrum was approximately 13 nm indicative of the high-quality of the ZnO nanoparticles. The optical properties of the ZnO nanoparticles were enhanced with increasing thickness of the deposited ZnO thin film.
URI
http://pubs.kist.re.kr/handle/201004/36215
ISSN
1567-1739
Appears in Collections:
KIST Publication > Article
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