Spiral type Piezoelectric MEMS power generator with shear mode

Title
Spiral type Piezoelectric MEMS power generator with shear mode
Authors
송현철강종윤윤석진김형찬
Keywords
energy harvesting; piezoelectrics; MEMS; spiral structure; shear mode
Issue Date
2009-09
Publisher
2009 IEEE International Ultrasonics Symposium
Citation
, 589-590
Abstract
In this study, the natural frequency of the energy harvester was a lower than a normal cantilever structure and sufficiently controllable in 50 - 200 Hz frequency region as adjusting weight of a proof mass. Moreover, the MEMS energy harvester had a higher energy conversion efficient because a shear mode (d15) is much larger than a 33 mode (d33) and the energy conversion efficiency is proportional to the piezoelectric constant (d).
URI
http://pubs.kist.re.kr/handle/201004/36270
Appears in Collections:
KIST Publication > Conference Paper
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