Influence of Sputtering Conditions on Structural and Electrochemical Properties of the Si Anode Film for Lithium Secondary Batteries
- Influence of Sputtering Conditions on Structural and Electrochemical Properties of the Si Anode Film for Lithium Secondary Batteries
- 주승현; 이성래; 조병원; 조원일
- lithium ion battery; silicon anode; deposition condition; sputtering
- Issue Date
- 한국재료학회지; Korean Journal of Materials Research
- VOL 19, NO 2, 73-78
- This study investigated the dependence of the various sputtering conditions (Ar pressure:
2~10 mTorr, Power: 50~150W) and thickness (50~1200 nm) of Si thin film on the electrochemical properties,
microstructural properties and the capacity fading of a Si thin film anode. A Si layer and a Ti buffer layer
were deposited on Copper foil by RF-magnetron sputtering. At 10 mTorr, the 50 W sample showed the best
capacity of 3323 mAh/g, while the 100W sample showed the best capacity retention of 91.7%, also at 10 mTorr.
The initial capacities and capacity retention in the samples apart from the 50W sample at 10 mTorr were
enhanced as the Ar pressure and power increased. This was considered to be related to the change of the
microstructure and the surface morphology by various sputtering conditions. In addition, thinner Si film anodes
showed better cycling performance. This phenomenon is caused by the structural stress and peeling off of the
Si layer by the high volume change of Si during the charge/discharge process.
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