Influence of Sputtering Conditions on Structural and Electrochemical Properties of the Si Anode Film for Lithium Secondary Batteries

Title
Influence of Sputtering Conditions on Structural and Electrochemical Properties of the Si Anode Film for Lithium Secondary Batteries
Authors
주승현이성래조병원조원일
Keywords
lithium ion battery; silicon anode; deposition condition; sputtering
Issue Date
2009-02
Publisher
한국재료학회지; Korean Journal of Materials Research
Citation
VOL 19, NO 2, 73-78
Abstract
This study investigated the dependence of the various sputtering conditions (Ar pressure: 2~10 mTorr, Power: 50~150W) and thickness (50~1200 nm) of Si thin film on the electrochemical properties, microstructural properties and the capacity fading of a Si thin film anode. A Si layer and a Ti buffer layer were deposited on Copper foil by RF-magnetron sputtering. At 10 mTorr, the 50 W sample showed the best capacity of 3323 mAh/g, while the 100W sample showed the best capacity retention of 91.7%, also at 10 mTorr. The initial capacities and capacity retention in the samples apart from the 50W sample at 10 mTorr were enhanced as the Ar pressure and power increased. This was considered to be related to the change of the microstructure and the surface morphology by various sputtering conditions. In addition, thinner Si film anodes showed better cycling performance. This phenomenon is caused by the structural stress and peeling off of the Si layer by the high volume change of Si during the charge/discharge process.
URI
http://pubs.kist.re.kr/handle/201004/36290
ISSN
1225-0562
Appears in Collections:
KIST Publication > Article
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