Properties of hydrogenated Al-doped ZnO films by multi-step texture

Title
Properties of hydrogenated Al-doped ZnO films by multi-step texture
Authors
탁성주강민구박성은김용현김원목김동환
Keywords
ZnO:Al; Hydrogenated; rf magnetron sputter; TCO; Surface textured
Issue Date
2009-05
Publisher
한국재료학회지; Korean Journal of Materials Research
Citation
VOL 19, NO 5, 574-579
Abstract
In this study we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by rf magnetron sputtering. AZO films on glass were prepared by changing the H2/(Ar + H2) ratio at a low temperature of 150℃. The prepared HAZO films showed the lower resistivity and the higher carrier concentration and mobility than those of non-hydrogenated AZO films. After deposition, the surface of HAZO films was multi-step textured in dilute HCl (0.5%) for the investigation of the change in the optical property and the surface morphology due to etching. As a result, the HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 52.3 %.
URI
http://pubs.kist.re.kr/handle/201004/36592
ISSN
1225-0562
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KIST Publication > Article
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