Effect of deposition temperature and Ga content on the properties of Ga-doped ZnO films

Title
Effect of deposition temperature and Ga content on the properties of Ga-doped ZnO films
Authors
손주명김용현이택성정병기정증현정대용성태연김원목
Keywords
TCO; Ga-doped ZnO; Deposition temperature; rf magnetron sputtering
Issue Date
2009-11
Publisher
19th International Photovoltaic Science and Engineering Conference
Citation
, 350-350
URI
http://pubs.kist.re.kr/handle/201004/36605
Appears in Collections:
KIST Publication > Conference Paper
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