Research Activities on PIII&D(Plasma Immersion Ion Implantation and Deposition) Technology at KIST
- Research Activities on PIII&D(Plasma Immersion Ion Implantation and Deposition) Technology at KIST
- 한승희; 박원웅; 전준홍; 최진영
- Issue Date
- MRS-J, 2009
- PIII&D(Plasma immersion ion implantation and deposition) technology is a very promising surface modification technology to improve the materials surface properties. In PIII&D, plasma immersion ion implantation technique, which is a very effective way to implant gaseous ions into the materials surface, is combined with thin film deposition technique such as magnetron sputtering.
The thin film can be simultaneously modified by high energy ion bombardment during deposition to improve the film properties. Furthermore, by operating the magnetron sputter deposition in high-power pulsed mode synchronized with the high voltage negative pulse bias that is applied to the substrate, non-gaseous ions such as metallic ions can be effectively implanted into the substrate owing to the highly ionized plasma state of target material.
At KIST, PIII and PIII&D technique have been applied to numerous fields for many years to modify materials surface, which includes improvement of wear property, shallow junction doping, polymer surface modification, application to SOI wafer manufacturing, application to artificial hip joint materials, etc. In this paper, the research activities and experimental results on PIII&D technology will be shown and discussed.
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- KIST Publication > Conference Paper
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