Research Activities on PIII&D(Plasma Immersion Ion Implantation and Deposition) Technology at KIST

Title
Research Activities on PIII&D(Plasma Immersion Ion Implantation and Deposition) Technology at KIST
Authors
한승희박원웅전준홍최진영
Issue Date
2009-12
Publisher
MRS-J, 2009
Abstract
PIII&D(Plasma immersion ion implantation and deposition) technology is a very promising surface modification technology to improve the materials surface properties. In PIII&D, plasma immersion ion implantation technique, which is a very effective way to implant gaseous ions into the materials surface, is combined with thin film deposition technique such as magnetron sputtering. The thin film can be simultaneously modified by high energy ion bombardment during deposition to improve the film properties. Furthermore, by operating the magnetron sputter deposition in high-power pulsed mode synchronized with the high voltage negative pulse bias that is applied to the substrate, non-gaseous ions such as metallic ions can be effectively implanted into the substrate owing to the highly ionized plasma state of target material. At KIST, PIII and PIII&D technique have been applied to numerous fields for many years to modify materials surface, which includes improvement of wear property, shallow junction doping, polymer surface modification, application to SOI wafer manufacturing, application to artificial hip joint materials, etc. In this paper, the research activities and experimental results on PIII&D technology will be shown and discussed.
URI
http://pubs.kist.re.kr/handle/201004/36977
Appears in Collections:
KIST Publication > Conference Paper
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