Effect of UV-siisted RTA on the electrical properties of (Ba,Sr)TiO3 films for MIM capacitor

Title
Effect of UV-siisted RTA on the electrical properties of (Ba,Sr)TiO3 films for MIM capacitor
Authors
조광환강민규강종윤윤석진이영백
Issue Date
2009-12
Publisher
ICAMD
URI
http://pubs.kist.re.kr/handle/201004/36991
Appears in Collections:
KIST Publication > Conference Paper
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