Microfabrication of single chamber SOFC with co-planar electrodes via multi-step photoresist molding with thermosetting polymer

Title
Microfabrication of single chamber SOFC with co-planar electrodes via multi-step photoresist molding with thermosetting polymer
Authors
김형철최선희김주선이해원송휴섭이종호
Keywords
Solid oxide fuel cell (SOFC); Photoresist molding (PRM); Single chamber operation; Interdigitated array (IDA); Thermosetting polymer
Issue Date
2010-06
Publisher
Journal of materials processing technology
Citation
VOL 210, NO 9, 1243-1248
Abstract
In this paper, we report a simple and novel microfabrication method, named photoresist molding with thermosetting polymer (PRM-TP) which is very efficient for fabricating multiple ceramic structures with sub-micron to several millimeter scaled dimension. PRM-TP is a novel hybrid process combining lithographic tools and customized ceramic slurry process which can utilize the advantages of micro-scale ceramic fabrication with well controlled microstructure. In order to demonstrate general usefulness of PRM-TP, we applied this process for the construction of single chamber solid oxide fuel cell (SC-SOFC) with co-planar electrodes. According to the cell test at 500 ◦C under single chamber operation condition with pre-mixed gas of methane and air, the open circuit voltage and power output of SC-SOFC reached 205 mV and 67 mW/㎠, respectively.
URI
http://pubs.kist.re.kr/handle/201004/37341
ISSN
0924-0136
Appears in Collections:
KIST Publication > Article
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