Spiral Type Piezoelectric MEMS Power Generator with Shear Mode

Title
Spiral Type Piezoelectric MEMS Power Generator with Shear Mode
Authors
송현철강종윤윤석진
Keywords
Energy harvesting; MEMS; shear mode; spiral
Issue Date
2010-04
Publisher
한국세라믹학회
URI
http://pubs.kist.re.kr/handle/201004/37406
Appears in Collections:
KIST Publication > Conference Paper
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