Hydrophobicity and Nanotribological Properties of Silicon Channels coated by Diamond-like Carbon Films

Title
Hydrophobicity and Nanotribological Properties of Silicon Channels coated by Diamond-like Carbon Films
Authors
Pham Duc Cuong나경환Van Hung Pham윤의성
Keywords
tribology; AFM; surface modification; channels; DLC
Issue Date
2009-12
Publisher
KSTLE international journal
Citation
VOL 10, NO 1/2, 1-5
Abstract
This paper reports an investigation on nanotribological properties of silicon nanochannels coated by a diamond-like carbon (DLC) film. The nanochannels were fabricated on Si (100) wafers by using photolithography and reactive ion etching (RIE) techniques. The channeled surfaces (Si channels) were then further modified by coating thin DLC film. Water contact angle of the modified and unmodified Si surfaces was examined by an anglemeter using the sessile-drop method. Nanotribological properties, namely friction and adhesion forces, of the Si channels coated with DLC (DLC-coated Si channels) were investigated in comparison with those of the flat Si, DLC-coated flat Si (flat DLC), and Si channels, using an atomic force microscope (AFM). Results showed that the DLC-coated Si channels greatly increased hydrophobicity of silicon surfaces. The DLC coating and Si channels themselves individually reduced adhesion and friction forces of the flat Si. Further, the DLCcoated Si channels exhibited the lowest values of these forces, owing to the combined effect of reduced contact area through the channeling and low surface energy of the DLC. This combined modification could prove a promising method for tribological applications at small scales.
URI
http://pubs.kist.re.kr/handle/201004/37449
ISSN
1229-9189
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE