Synthesis and dielectric chracteristics of PZT thin films by sol-gel method and UV-assisted RTA

Title
Synthesis and dielectric chracteristics of PZT thin films by sol-gel method and UV-assisted RTA
Authors
오승민강민규조광환강종윤남산윤석진
Issue Date
2010-06
Publisher
7th AMF-AMEC-2010
URI
http://pubs.kist.re.kr/handle/201004/37688
Appears in Collections:
KIST Publication > Conference Paper
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