Highly sensitive CO sensors based on cross-linked TiO2 hollow hemispheres
- Highly sensitive CO sensors based on cross-linked TiO2 hollow hemispheres
- 문희규; 심영석; 장호원; 김진상; 최경진; 강종윤; 최지원; 박형호; 윤석진
- CO sensors; TiO2; Hollow hemispheres; Nanostructured
- Issue Date
- Sensors and actuators. B, Chemical
- VOL 149, NO 1, 116-121
- We report the fabrication of a highly sensitive gas sensor based on a network of nanostructured
TiO2 hollow hemispheres (NTHH). O2 plasma etching induces cross-linking of hexagonal-close-packed
polystyrene array, which is adopted as a template substrate for room-temperature deposition of TiO2
thin film. High-temperature calcination effectively removes polystyrene template beads and promotes
crystallization of TiO2, finally producing cross-linked NTHH via nanobridges. The gas-sensing capability
of a NTHH-based sensor is demonstrated using 1–500ppm CO. Our sensor exhibits a very high response
of 4220% change in resistance when exposed to 500ppm CO at 250 ℃, whereas a gas sensor based on a
plain TiO2 film shows a 195% change. The high sensitivity of the NTHH-based sensor is attributed to the
enhanced gas sensing performance of the narrow nanobridges between hollow hemispheres.
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