Gas sensitivity modulation of oxide thin films by means of an electrical method

Title
Gas sensitivity modulation of oxide thin films by means of an electrical method
Authors
Jaehyun MoonJin-Ah ParkSu-Jae LeeHye Yong ChuTaehyoung Zyung김일두
Keywords
Metal oxide; Pulsed laser deposition; Sensitivity; Impedance spectroscopy; DC bias
Issue Date
2010-07
Publisher
Sensors and actuators. B, Chemical
Citation
VOL 148, NO 2, 539-543
Abstract
To enhance the sensitivity of a metal oxide-based gas sensor, we introduce a novel electrical method that relies jointly on the use of impedance and an applied DC bias. We used polycrystalline ZnO–NiO composite thin films prepared by pulsed layer deposition as CO gas sensor material. The applied DC bias lowers the interface barrier between oxide grains and thereby enhances the sensitivity. Our approach enhances the sensitivity to CO gas by approximately 200% more than a conventional DC method. The enhancement effect is more pronounced when the CO concentration is lowered. This method offers an efficient characterization tool for modulating the sensitivity of gas sensors using semiconducting metal oxides.
URI
http://pubs.kist.re.kr/handle/201004/37765
ISSN
0925-4005
Appears in Collections:
KIST Publication > Article
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