Formation mechanisms of metallic Zn nanodots by using ZnO thin films deposited on n-Si substrates

Title
Formation mechanisms of metallic Zn nanodots by using ZnO thin films deposited on n-Si substrates
Authors
J.M. YukJ.Y. LeeY. Kim노영수김태환최원국
Keywords
Zn nanodot; ZnO; TEM
Issue Date
2010-08
Publisher
Applied physics letters
Citation
VOL 97, NO 6, 061901-1-061901-3
Abstract
High-resolution transmission electron microscopy and energy dispersive x-ray spectroscopy results showed that metallic Zn nanodots NDs were fabricated through transformation of ZnO thin films by deposition of SiOx on ZnO/n-Si (100) heterostructures. The Zn NDs with various sizes and densities were formed due to the occurrence of the mass diffusion of atoms along the grain boundaries in the ZnO thin films. The fabrication mechanisms of metallic Zn NDs through transformation of ZnO thin films deposited on n-Si substrates are described on the basis of the experimental results.
URI
http://pubs.kist.re.kr/handle/201004/37835
ISSN
0003-6951
Appears in Collections:
KIST Publication > Article
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