Excimer laser annealing effect on the optical properties of ZnO thin film grown by sol-gel method

Title
Excimer laser annealing effect on the optical properties of ZnO thin film grown by sol-gel method
Authors
김경원박동훈이동윤풀락김상식이상렬
Issue Date
2010-08
Publisher
Changchun 2010
Citation
, 259-259
Abstract
In conclusion, ZnO thin films are deposited by sol-gel method with 1 Mol zinc acetated concentrations. We have demonstrated the effect of KrF excimer laser annealing on the photoluminescence and surface morphology of ZnO thin films with different spin coating speed. As-grown ZnO thin films, these samples show a strong and broad blue-green emission with a peak centered at about 490 nm, which is originated from intrinsic defects such as O and Zn vacancies or interstitials. However, after KrF excimer laser annealing ZnO thin films, blue-green emission is decreased, because intrinsic defects such as O and Zn vacancies or interstitials are removed or filled. Finally, a KrF excimer laser annealing is good treatment process to increase the crystal quality or change the PL intensity of ZnO thin films. Also, it is very important to note that KrF excimer laser annealing is good candidate for low temperature process for the application of flexible devices.
URI
http://pubs.kist.re.kr/handle/201004/37870
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KIST Publication > Conference Paper
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