Excimer laser annealing effect on the optical properties of ZnO thin film grown by sol-gel method
- Excimer laser annealing effect on the optical properties of ZnO thin film grown by sol-gel method
- 김경원; 박동훈; 이동윤; 풀락; 김상식; 이상렬
- Issue Date
- Changchun 2010
- , 259-259
- In conclusion, ZnO thin films are deposited by sol-gel method with 1 Mol zinc acetated concentrations. We have demonstrated the effect of KrF excimer laser annealing on the photoluminescence and surface morphology of ZnO thin films with different spin coating speed. As-grown ZnO thin films, these samples show a strong and broad blue-green emission with a peak centered at about 490 nm, which is originated from intrinsic defects such as O and Zn vacancies or interstitials. However, after KrF excimer laser annealing ZnO thin films, blue-green emission is decreased, because intrinsic defects such as O and Zn vacancies or interstitials are removed or filled. Finally, a KrF excimer laser annealing is good treatment process to increase the crystal quality or change the PL intensity of ZnO thin films. Also, it is very important to note that KrF excimer laser annealing is good candidate for low temperature process for the application of flexible devices.
- Appears in Collections:
- KIST Publication > Conference Paper
- Files in This Item:
There are no files associated with this item.
- RIS (EndNote)
- XLS (Excel)
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.