Modeling and Characterization of Piezoelectric d(33)-Mode MEMS Energy Harvester

Title
Modeling and Characterization of Piezoelectric d(33)-Mode MEMS Energy Harvester
Authors
박종철박재영이윤표
Keywords
Bulk micromachining; Energy harvesting; interdigital electrodes; lead zirconate titanate (PZT) ceramics; piezoelectric effect; vibrations; microelectromechanical systems(MEMS)
Issue Date
2010-12
Publisher
Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems
Citation
VOL 19, NO 5, 1215-1222
URI
http://pubs.kist.re.kr/handle/201004/37900
ISSN
1057-7157
Appears in Collections:
KIST Publication > Article
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