Modeling and Characterization of Piezoelectric d(33)-Mode MEMS Energy Harvester
- Modeling and Characterization of Piezoelectric d(33)-Mode MEMS Energy Harvester
- 박종철; 박재영; 이윤표
- Bulk micromachining; Energy harvesting; interdigital electrodes; lead zirconate titanate (PZT) ceramics; piezoelectric effect; vibrations; microelectromechanical systems(MEMS)
- Issue Date
- Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems
- VOL 19, NO 5, 1215-1222
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- KIST Publication > Article
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