Design and fabrication of multi-layer antireflection coating for III-V solar cell
- Design and fabrication of multi-layer antireflection coating for III-V solar cell
- 정성목; 김영환; 김성일; 유상임
- Zinc sulfide; Magnesium fluoride; Antireflection coating; Optical constants; rf magnetron sputtering
- Issue Date
- Current applied physics
- VOL 11, NO 3, 538-541
- ZnS and ZnS-MgF2 composite films were prepared on soda-lime glass substrates and MgF2 films on GaAs
by rf magnetron sputtering to investigate multi-layer antireflection (AR) coatings. Optical constants of
these films were determined by envelope method and spectroscopic ellipsometry. In particular, ZnS
-MgF2 composite films were fabricated by co-sputtering of ZnS and MgF2 target to obtain intermediate
refractive index material for a middle layer in the triple-layer AR coating and these films exhibited the
desired intermediate refractive index. Based on the extracted optical constants, single-, double- and
triple-layer AR coatings on GaAs substrates were designed and fabricated by rf magnetron sputtering.
Low reflectance could be obtained from single-layer AR coating only at a specific wavelength and could
be obtained from multi-layer AR coating at wide wavelength regime. Additionally, incident angle
dependence of the reflectance of the multi-layer AR coatings was also investigated and showed different
behavior according to a number of layers.
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