Highly flexible indium zinc oxide electrode grown on PET substrate by cost efficient roll-to-roll sputtering process
- Highly flexible indium zinc oxide electrode grown on PET substrate by cost efficient roll-to-roll sputtering process
- 박용석; 김한기; 정순욱; 조운조
- transparency; sheet resistance; flexibility; Indium zinc oxide (IZO); Roll-to-roll sputter; Transparency
- Issue Date
- Thin solid films
- VOL 518, NO 11, 3071-3074
- We have investigated the characteristics of flexible indium zinc oxide (IZO) electrode grown on polyethylene
terephthalate (PET) substrates using a specially designed roll-to-roll (RTR) sputtering system for use in flexible
optoelectronics. It was found that both electrical and optical properties of the flexible IZO electrode were
critically dependent on the DC power and Ar/O2 flow ratio during the roll-to-roll sputtering process. At
optimized conditions (constant working pressure of 3 mTorr, Ar/O2 flow ratio of Ar at only 30 sccm, DC power
800W and rolling speed at 0.1 cm/s) the flexible IZO electrode exhibits a sheet resistance of 17.25Ω/sq and
an optical transmittance of 89.45% at 550 nm wavelength. Due to the low PET substrate temperature, which is
effectively maintained by cooling drum system, all IZO electrodes showed an amorphous structure regardless
of the DC power and Ar/O2 flow ratio. Furthermore, the IZO electrodes grown at optimized condition exhibited
superior flexibility than the conventional amorphous ITO electrodes due to its stable amorphous structure.
This indicates that the RTR sputter grown IZO electrode is a promising flexible electrode that can substitute
for the conventional ITO electrode, due to its low resistance, high transparency, superior flexibility and fast
preparation by the RTR process.
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