Characteristics of Transparent Conducting Al-doped ZnO Films Prepared by Sputtering System
- Characteristics of Transparent Conducting Al-doped ZnO Films Prepared by Sputtering System
- 정성목; 김영환; 김성일; 유상임
- Transparent Conducting oxide; Al-doped ZnO; sputtering
- Issue Date
- IUMRS-ICEM 2010
- Transparent conducting oxide (TCO) films have been studied for various photo-electronic devices such as displays and solar cells. In the case of solar cell, Al-doped zinc oxide (AZO) film has been extensively investigated due to a large band gap, high transparency and low resistivity. And RF and DC sputtering system have been universally used for fabrication of AZO film. In this study, electrical and optical properties of Al-doped zinc oxide (AZO) films were carefully investigated. AZO thin films were deposited on soda-lime glass(SLG) substrates by RF and DC magnetron sputtering system with changing deposition parameters such as substrate temperature(R.T~350℃), power(50W~150W) and pressure. Resistivity and transmittance were measured by four point probe and spectrophotometer, respectively. RF magnetron sputtered AZO films were highly transparent in the wide wavelength region but showed large resistivity. However, transmittance of dc magnetron sputtered AZO film highly decreased with increasing substrate temperature in the near infra-red (NIR) region and resistivity of the film showed low value. And resistivity of all AZO films decreased with increasing substrate temperature at the substrate temperatures of R.T~270℃. This behavior was correlated with the crystal structure and microstructure. XRD results indicate that the AZO films were grown with a (002)-preferred orientation and the crystallinity of the film was enhanced with increasing substrate temperature. From the SEM images, the grain size of AZO film increased with increasing substrate temperature. Based on XRD patterns and SEM images, electrical and optical properties of transparent conducting Al-doped ZnO Films was analyzed. Details will be presented for a discussion.
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