Development of improving directional problem and reducing cap distance between stimulation and recording sites in optical neural probe for deep brain stimulation

Title
Development of improving directional problem and reducing cap distance between stimulation and recording sites in optical neural probe for deep brain stimulation
Authors
박형달송혜정김태훈신현준윤의성서준교김진석
Keywords
Optical stimulation; Optical neural probe; Wet etching mirror surface
Issue Date
2010-11
Publisher
40th Annual Meeting, Society for Neuroscience
Abstract
Optical stimulation has recently been reported as an alternative to electrical stimulation with potential advantages such as noncontact stimulation and investigated to selectively stimulate the specific nerves. Although, this offers the prospect of enabling local delivery of optical stimulation and the simultaneous monitoring of the neural activity, there are significant problems that optical stimulation and electrical signal recording site is vertically located to each other. It means that optically stimulated specific nerves are normally located to front of probe and recording electrodes were already fabricated on normal direction of substrate. Furthermore, a recent report on optical stimulation still has a large gap between the stimulation and recording sites more than 0.4mm. This construction may lead to non-correct or low scale signal outputs because of vertical direction and long gap distance between stimulation and recording sites. In this paper, we report a new approach of optical neural probe to improve directional problem and reduce gap distance between stimulation and recording sites at least 150μm by wet etching mirror surface of V-groove. Proposed device based on double side polished Si wafer with silicon nitride passivation layer by LPCVD is made by MEMS technology. Lift-off process was used to fabricate titanium and iridium oxide patterns for signal recording and also chrome and gold pads for wire bonding. And V-groove with mirror surface and probe shank releasing are fabricated by KOH wet etching. Defining of probe dimension is built up by Deep RIE process. Fabricated device is integrated on PCB. Finally, optical fiber is aligned to V-groove by optical fiber aligner. Consequently, the proposed approach provides to improve directional problem and achieve at least 150μm gap distance between stimulation and recording sites by wet etching mirror surface in V-groove. Furthermore, w
URI
http://pubs.kist.re.kr/handle/201004/38486
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KIST Publication > Conference Paper
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