A comparison of quantitative analysis for various matrix containing Fe/Ni by depth profiling of dynamic SIMS
- A comparison of quantitative analysis for various matrix containing Fe/Ni by depth profiling of dynamic SIMS
- 임원철; 이지혜; 이연희
- quantitative; depth profiling; dynamic SIMS; thin layer; Fe/Ni
- Issue Date
- 대한화학회 학술발표회(춘계)
- Dynamic SIMS has been widely used in an elemental analysis and a depth-profiling for a trace materials existed on the surface because they are highly sensitive to detect a ion current as much as ppm or ppb. However, matrix-dependent secondary ion yields limit the capability of the SIMS technique to obtain quantitative information and there are so many efforts to solve a difficulty to determinate the quantitative analysis due to different matrix effect according to having a different composition. Therefore, we used a Dynamic SIMS and investigated Fe/Ni material to determine the suitable quantitative analysis of thin layer mixed with homogeneous binary alloys such as Fe/Ni, Co/Pt and W/si. We have obtained a calibration curve to give comparison of quantitative analysis information as much as lower standard deviation. We also have examined for various matrix containing Fe/Ni. The result will be presented and discussed.
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