Study on the Self-assembled Process of Single-Walled Caborn Nanotubes (SWCNTs) Fabricated Using only photolithography and the Fabrication of SWNT-based Multi-channel Field Emission Transistors
- Study on the Self-assembled Process of Single-Walled Caborn Nanotubes (SWCNTs) Fabricated Using only photolithography and the Fabrication of SWNT-based Multi-channel Field Emission Transistors
- 김경헌; 김태근; 김선호; 변영태
- 단일벽 탄소나노튜브; 전계효과트랜지스터; 포토리소그라피; SWNT; CNT; FET; Photolithography
- Issue Date
- VOL 60, NO 6, 591-594
- In this research, we investigated a selective assembly method of fabricating single-walled carbon
nanotubes (SWNTs) on a silicon (Si) surface by using only a photolithographic process; then, we fabricated
field-emission transistors (FETs). Photoresist (PR) patterns were made on a silicon-dioxide
(SiO2)-grown Si substrate by using a photolithographic process. This PR-patterned substrate was
dipped into a SWNT solution dispersed in dichlorobenzene (DCB). The PR patterns were removed
by using aceton. As a result, selectively-assembled SWNT channels could be obtained between
two electrodes (source and drain electrodes) without complicated chemical steps using octadecyltrichlorosilane
(OTS). Finally, we successfully fabricated SWNT-based multi-channel FETs by using
our novel self-assembly method.
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