Processing technique for SWNT-based sensors arrays

Processing technique for SWNT-based sensors arrays
SWCNT; sensor array; FET; O2 plasma
Issue Date
International Conference on Electronic Materials 2010 presented by International Union of Materials Research Societies(IUMRS-ICEM 2010)
, 126
Since discovery of single-walled carbon nanotubes (SWNTs) in 1991, the SWNTs continue to be researched and developed. Outstanding properties of the SWNTs play an important role in nanoelectronics and polymer nanocomposites. The SWNTs can be semiconducting and used as electronic channels between two electrodes. Kong et al. reported that the SWNTs could be used for chemical sensors to detect chemicals such as NO2 and NH3 at room temperature [1]. Polymer functionalization was used for nanotube sensors to have high selectivity unlike conventional sensors. However, SWNT sensor arrays have not been developed for specific molecular detection in both solutions and gases yet. We propose 8´8 arrays of SWNT-based field effect transistors (FETs) for chemical sensors. They are consisted of four different groups of FET arrays to detect different gases. Here we fabricate these 8´8 FET arrays using only photolithographic process and O2 plasma treatment to assemble SWNTs onto the channels. These are successfully demonstrated from electrical current measurements for each device. Processing technique for the SWNT-based sensor arrays is as follows: The gate electrodes are deposited on a SiO2-grown silicon substrate. Next, the source and drain electrodes are deposited on a 300-nm thick oxide on the gate electrodes. The property of the substrate surface is converted from the hydrophobic property into the hydrophilic property using O2 plasma treatment. The SWNTs have stronger affinity with hydrophilic molecules [2]. Photoresist patterns to assemble the SWNTs onto the channels are made by using photolithographic process on the substrate. This patterned substrate is dipped into a SWNT solution dispersed in dichlorobenzene. Finally, photoresist patterns are removed and the SWNT channels between two electrodes are selectively assembled.
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