Crystallization behavior of amorphous SiNx, BN and CNx phase with transition metal nitride (TiAlN and ZrN) layer in nanoscale multilayered coating

Title
Crystallization behavior of amorphous SiNx, BN and CNx phase with transition metal nitride (TiAlN and ZrN) layer in nanoscale multilayered coating
Authors
박종극백영준이욱성
Keywords
nanoscale multilayered coating; crystallization; amorphous nitride phase; hardness; metal nitride
Issue Date
2010-09
Publisher
12th International Conference on Plasma Surface Engineering (PSE 2010)
Abstract
Nanoscale multilayered structurization, especially in multicomponent systems, is an effective way to improve the mechanical properties of metal nitride coating. It has also been adopted to crystallize amorphous phase such as SiNx, BN and CNx with transition metal nitride. The crystallization of amorphous phase drastically increases the hardness value of nanoscale multilayered coatings comprised of the phases. In this study, we investigated crystallization behavior of MeN/SiNx, MeN/BN and MeN/CNx nanoscale multilayered coatings prepared by reactive sputtering process with N2 and Ar gases. As a target source for transition metal nitride, TiAl and Zr was used. The amorphous phases of SiNx, BN and CNx were deposited with Si, hBN and graphite targets, respectively. The layer thickness was controlled by rotation speed of substrate holder and target power density. For the MeN/SiNx, MeN/BN and MeN/CNx nanoscale multilayered coatings, the crystallization of SiNx, BN and CNx layers was observed when the thickness of the layers was below the critical value. Furthermore, the critical thickness for crystallization of amorphous layer was dependent on transition metal nitride (TiAlN, ZrN) layer as well as amorphous (SiNx, BN and CNx) layer. Such a microstructure change was observed to critically influence the hardness value of nanoscale multilayered coatings comprised of SiNx, BN and CNx phases. The hardness change with crystallization behavior depending on chemical composition in MeN/aN (Me:TiAl, Zr; a:Si, B, C) coating systems will be discussed.
URI
http://pubs.kist.re.kr/handle/201004/38719
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KIST Publication > Conference Paper
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