Electrical and optical properties of Al-doped zinc oxide thin films deposited at room temperature by using continuous composition spread methode

Title
Electrical and optical properties of Al-doped zinc oxide thin films deposited at room temperature by using continuous composition spread methode
Authors
정근신동욱윤석진최지원최원국송종한김현재
Keywords
Continuous composition spread; Thin films; Transparent conducting oxide; Al-doped ZnO
Issue Date
2010-10
Publisher
Journal of the Korean Physical Society
Citation
VOL 57, NO 4, 1092-1095
Abstract
Al-doped ZnO (AZO) thin films were deposited on glass substrates at room temperature by using the continuous composition spread (CCS) method. CCS is a thin-film growth method for various AlxZn1−xO thin film compositions with a binary or ternary composition spread, and the critical properties can be evaluated as functions of position, which is directly related to material composition, by using an automated probe station. Various compositions of Al-doped ZnO thin films deposited at room temperature were explored to find excellent electrical and optical properties. The lowest resistivity of the AZO thin films deposited at room temperature was 2.8 × 10−3 Ω·cm, and the average transmittance in the 400-to-900-nm wavelength region was 93%. The optimized composition of the AZO thin film, which had the lowest resistivity and highest transmittance was Al0.05Zn1O1.05 (about 3.13-wt% Al2O3).
URI
http://pubs.kist.re.kr/handle/201004/38748
ISSN
0374-4884
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KIST Publication > Article
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