High-Resolution, Parallel Patterning of Nanoparticles via an Ion-Induced Focusing Mask

Title
High-Resolution, Parallel Patterning of Nanoparticles via an Ion-Induced Focusing Mask
Authors
유석범한규희김형철이희철우창규정창의남웅식최만수
Keywords
Patterning; Nanoparticle; Mask; Gas Sensor
Issue Date
2010-10
Publisher
Small
Citation
VOL 6, NO 19, 2146-2152
Abstract
An ion-induced focusing mask under the simultaneous injection of ions and charged aerosols generates invisible electrostatic lenses around each opening, through which charged nanoparticles are convergently guided without depositing on the mask surface. The sizes of the created features become signifi cantly smaller than those of the mask openings due to the focusing capability. It is not only demonstrated that material-independent nanoparticles including proteins can be patterned as an ordered array on any surface regardless of the conductive, nonconductive, or fl exible nature of the substrate, but also that the array density can be increased. Highly sensitive gas sensors based on these focused nanoparticle patterns are fabricated via the concept.
URI
http://pubs.kist.re.kr/handle/201004/38788
ISSN
1613-6810
Appears in Collections:
KIST Publication > Article
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