The characterization of implantable and flexible nerve cuff electrode using different conducting materials through in-vitro and in-vivo experiments
- The characterization of implantable and flexible nerve cuff electrode using different conducting materials through in-vitro and in-vivo experiments
- 이수현; 정정환; 채연미; 민중기; 서준교; 강지윤
- Nerve cuff electrode; Conducting materials; IrOx; implantable; Pt; Ir; In-vivo experiments
- Issue Date
- BIOSENSORS 2010
- In this research, the implantable and flexible nerve cuff electrodes have been developed using polyimide (PI) as a substrate material and platinum (Pt), iridium (Ir), and iridium oxide (IrOx) as conducting materials, respectively. In order to investigate the suitability of nerve electrodes for stimulating and sensing electrodes, each nerve electrode has been characterized through In-vitro and In-vivo experiments.
Figure 1 shows the schematic of a flexible nerve cuff electrode wrapping around peripheral nerve. The nerve electrode was designed to wrap the sciatic nerve of rat. The entire fabrication procedure is presented in figure 2. First, the liquid PI was spin-coated onto a silicon wafer to a thickness of 15 μm, and the wafer was placed inside a convection oven at 200 °C for 1 hour to thermally cure the PI. After the conventional photolithography process with image reversal photoresist, Ti/Pt, Ti/Ir, and Ti/IrOx were deposited by RF sputter on separate polyimide substrates. Conducting materials, such as Pt, Ir, and IrOx, were deposited to a thickness of 300 nm. A second PI layer was spun to a thickness of 5 μm for insulation. In order to open the sites of the conducting materials, photoresist was patterned, and then PI was dry etched in O2 plasma by RIE. Each opening area of the conducting materials was 250 μm x 250 μm. After the etching process, the nerve electrode was diced by using a femtosecond laser. The nerve cuff electrodes can be freely connected to external instruments through customized connector, as shown in figure 3.
To investigate the suitability of nerve electrodes for stimulating and sensing electrodes, the charge delivery capacity (CDC) of each nerve electrode was measured through In-vitro experiments. And also, electrochemical impedance of each nerve electrode was measured during 4 weeks after the implant into the sciatic nerve of the rat as shown in figure 4.
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