Fabrication and characterization of implantable and flexible nerve cuff electrodes with Pt, Ir, and IrOx films deposited by RF sputtering
- Fabrication and characterization of implantable and flexible nerve cuff electrodes with Pt, Ir, and IrOx films deposited by RF sputtering
- 정정환; 강지윤; 김태송; 이수현
- cuff electrode; CDC; EIS; working pressure
- Issue Date
- 한국 MEMS 학술대회
- This paper presents the fabrication and characterization of implantable and flexible nerve cuff electrodes for neural interfaces using the conventional BioMEMS technique. In order to fabricate a flexible nerve electrode, polyimide (PI) was chosen as the substrate material. Then, nerve electrodes were thermally re-formed in a cuff shape so as to increase the area in which the charges were transferred to the nerve. Platinum (Pt), iridium (Ir), and iridium oxide (IrOx) films, which were to serve as conducting materials for the nerve electrodes, were deposited at different working pressures by RF magnetron sputter. The electrochemical properties of the deposited films were characterized by electrochemical impedance spectroscopy (EIS). The charge delivery capacities of the films were recorded and calculated by cyclic voltammetry (CV). The deposited films of Pt, Ir, and IrOx have strong differences in electrochemical properties, which depend on the working pressure of sputter. Each film deposited at 30 mTorr of working pressure shows the highest value of charge delivery capacity (CDC).
- Appears in Collections:
- KIST Publication > Conference Paper
- Files in This Item:
There are no files associated with this item.
- RIS (EndNote)
- XLS (Excel)
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.