Fabrication and characterization of implantable and flexible nerve cuff electrodes with Pt, Ir, and IrOx films deposited by RF sputtering

Title
Fabrication and characterization of implantable and flexible nerve cuff electrodes with Pt, Ir, and IrOx films deposited by RF sputtering
Authors
정정환강지윤김태송이수현
Keywords
cuff electrode; CDC; EIS; working pressure
Issue Date
2010-04
Publisher
한국 MEMS 학술대회
Abstract
This paper presents the fabrication and characterization of implantable and flexible nerve cuff electrodes for neural interfaces using the conventional BioMEMS technique. In order to fabricate a flexible nerve electrode, polyimide (PI) was chosen as the substrate material. Then, nerve electrodes were thermally re-formed in a cuff shape so as to increase the area in which the charges were transferred to the nerve. Platinum (Pt), iridium (Ir), and iridium oxide (IrOx) films, which were to serve as conducting materials for the nerve electrodes, were deposited at different working pressures by RF magnetron sputter. The electrochemical properties of the deposited films were characterized by electrochemical impedance spectroscopy (EIS). The charge delivery capacities of the films were recorded and calculated by cyclic voltammetry (CV). The deposited films of Pt, Ir, and IrOx have strong differences in electrochemical properties, which depend on the working pressure of sputter. Each film deposited at 30 mTorr of working pressure shows the highest value of charge delivery capacity (CDC).
URI
http://pubs.kist.re.kr/handle/201004/38929
Appears in Collections:
KIST Publication > Conference Paper
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