Fabrication and characterization of cuff type flexible sensor with Pt, Ir and IrOx films

Fabrication and characterization of cuff type flexible sensor with Pt, Ir and IrOx films
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In this study, we describe the fabrication and characterization of flexible nerve cuff sensor using polyimide (PI). Platinum (Pt), iridium (Ir) and iridium oxide (IrOx) films were deposited on the polyimide substrates by RF magnetron sputter at room temperature. During metal deposition, the working pressure of the sputter was controlled of 10, 30 and 100 mTorr, respectively. In the case of the IrOx, the film was deposited with four different Ar : O₂ gas ratio of 1:1, 2:1, 8:1, and 20:1. Electrochemical properties of the films, such as an electrochemical impedance spectroscopy (EIS) and charge delivery capacity (CDC) 1), were measured by three electrode system. The surfaces of sputtered films were observed by scanning electron microscopy (SEM) to monitor the grain size and surface morphology2). The grain size range of Pt, Ir and IrOx particles was changed by working pressure of the sputter. Cuff sensor deposited at 30 mTorr has a rough surface morphology and large particles. However, the surface of the IrOx shown different surface condition, such as dendritic structure. Each deposited film under working pressure of 30 mTorr showed the highest CDC value. When the IrOx film was deposited under condition of 8: 1(Ar : O₂ gas ratio), the CDC value was 59.5 mC/cm2 which was the highest value in several conditions. We indicated that the electrochemical property of electrode was strongly related Ar : O2 gas ratio as well as working pressure.
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