Comparison of Thickness Dependent Properties of ITO and GZO Thin Films Grown on Glass and PET Substrates
- Comparison of Thickness Dependent Properties of ITO and GZO Thin Films Grown on Glass and PET Substrates
- 김진수; 정증현; 박종극; 이경석; 백영준; 성태연; 김원목
- Transparent conducting oxide; PET; ITO; Ga doped ZnO
- Issue Date
- , 128-128
- Gallium-doped ZnO (GZO) and tin-doped In2O3 (ITO) films were fabricated by radio frequency
(rf) magnetron sputtering on Corning glass and 180 μm thick polyethylen terephthalate (PET)
substrate at room temperature, and the variations in electrical, optical and structural properties with
varying film thickness were investigated. The film thicknesses were in the range from 10 to 1000 nm.
GZO films were deposited in pure Ar gas, and ITO films were grown in Ar-O2 (1 vol.%) gas mixtures.
For both TCO materials, the electrical properties of films deposited on glass and PET substrates did
not differ very much, and the resistivity values of films deposited on PET were slightly higher than
those grown on glass substrate, which was caused by lower carrier concentration mainly. The absolute
transmittance spectra of films deposited on glass were about 2-3% higher than those prepared on PET,
which is attributed to the difference in optical transmission between substrates. However, the optical
transmittance referenced with respect to substrate was slightly higher for films deposited on PET, the
average transmittance in visible range reaching as high as 93%. For ITO films, the thickness
dependent variation in resistivity was relatively small and remained at about ~ 4 x 10-4 Ωcm except for
10 nm thick film. On the other hand, GZO films showed very large variation in resistivity and
monotonically decreasing behavior with increasing thickness. Except for the 1000 nm thick film, GZO
films exhibited much higher resistivity than ITO films due to substantially lower Hall mobility in GZO
films. More detailed discussion on the effect of thickness variation on the electrical and optical
properties of GZO and ITO films will be presented in connection with structural evolution observed
by XRD and TEM analyses.
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