Comparison of Thickness Dependent Properties of ITO and GZO Thin Films Grown on Glass and PET Substrates

Comparison of Thickness Dependent Properties of ITO and GZO Thin Films Grown on Glass and PET Substrates
Transparent conducting oxide; PET; ITO; Ga doped ZnO
Issue Date
, 128-128
Gallium-doped ZnO (GZO) and tin-doped In2O3 (ITO) films were fabricated by radio frequency (rf) magnetron sputtering on Corning glass and 180 μm thick polyethylen terephthalate (PET) substrate at room temperature, and the variations in electrical, optical and structural properties with varying film thickness were investigated. The film thicknesses were in the range from 10 to 1000 nm. GZO films were deposited in pure Ar gas, and ITO films were grown in Ar-O2 (1 vol.%) gas mixtures. For both TCO materials, the electrical properties of films deposited on glass and PET substrates did not differ very much, and the resistivity values of films deposited on PET were slightly higher than those grown on glass substrate, which was caused by lower carrier concentration mainly. The absolute transmittance spectra of films deposited on glass were about 2-3% higher than those prepared on PET, which is attributed to the difference in optical transmission between substrates. However, the optical transmittance referenced with respect to substrate was slightly higher for films deposited on PET, the average transmittance in visible range reaching as high as 93%. For ITO films, the thickness dependent variation in resistivity was relatively small and remained at about ~ 4 x 10-4 Ωcm except for 10 nm thick film. On the other hand, GZO films showed very large variation in resistivity and monotonically decreasing behavior with increasing thickness. Except for the 1000 nm thick film, GZO films exhibited much higher resistivity than ITO films due to substantially lower Hall mobility in GZO films. More detailed discussion on the effect of thickness variation on the electrical and optical properties of GZO and ITO films will be presented in connection with structural evolution observed by XRD and TEM analyses.
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