Analysis and Design of Spiral type MEMS Power Generator with Shear Mode

Analysis and Design of Spiral type MEMS Power Generator with Shear Mode
Energy harvesting; MEMS; Piezoelectrics; Power generator; Shear mode
Issue Date
International Conference on Electronic Materials and Nanotechnology for Green Environment 2010
, 473-473
The process of acquiring the energy surrounding a system and converting it into usable electrical energy is termed power harvesting. In the last few years, there has been a surge of research in the area of power harvesting. This increase in research has been brought on by the modern advances in wireless technology and low power electronics such as micro-electromechanical systems (MEMS). In particular, the piezoelectric energy harvesting from ambient vibration sources has intensively researched because it has a relatively high power density comparing with other energy scavenging methods. Through recent advances in low power consumption RF transmitters and sensors, it is possible to adopt a micro-power energy harvesting system realized by MEMS technology for the system-on-chip. However, the MEMS energy harvesting system has some drawbacks such as a high natural frequency over 300 Hz and a small power generation due to a small dimension. To overcome these limitations, we devised a novel power generator with a spiral spring structure as shown in the figure. The natural frequency of a cantilever could be decreased to the usable frequency region (under 300 Hz) because the natural frequency depends on the length of a cantilever. In this study, the natural frequency of the energy harvester was a lower than a normal cantilever structure and sufficiently controllable in 50 - 200 Hz frequency region as adjusting weight of a proof mass. Moreover, the MEMS energy harvester had a high energy conversion efficiency using a shear mode (d15) is much larger than a 33 mode (d33) and the energy conversion efficiency is proportional to the piezoelectric constant (d). We expect the spiral type MEMS power generator would be a good candidate for a standalone power generator for USN
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