Piezoelectric Response Analysis of PZT Thin Films by Scanning Laser Vibrometer

Title
Piezoelectric Response Analysis of PZT Thin Films by Scanning Laser Vibrometer
Authors
강민규오승민도영호백동수강종윤윤석진
Issue Date
2010-10
Publisher
7th International Workshop on Piezoelectric Materials and Applications in Actuators
Abstract
Recently, to evaluate the piezoelectric response for the thin films, the piezoelectric force microscopy (PFM) was mostly used. However, the PFM able to be apply just 1 μm2 area. Therefore, effective evaluation method which is able to apply the large area and has high resolution is needed to suggest the effective evaluation method for micro-device application. In this work, poly-crystalline PbZr0.52Ti0.48O3 (PZT) thin films were fabricated on Pt/Ti/SiO2/Si substrate by sol-gel method. The top electrodes were deposited with various pattern size and shape and polling was carried out between top and bottom electrode. The displacement and vibration mode were measured by the scanning laser vibrometer and calculated effective piezoelectric coefficient (d33eff). The piezoelectric behaviors were analyzed as a function of film thickness, pattern size, applied voltage and measuring frequency. As a result, we were able to classify the piezoelectric behavior and quantify the piezoelectric response with various effective factors.
URI
http://pubs.kist.re.kr/handle/201004/39039
Appears in Collections:
KIST Publication > Conference Paper
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