Micro Piezoelectric Motors
- Micro Piezoelectric Motors
- 윤석진; 강종윤; 이원희
- Issue Date
- 59th ICAT/JTTAS joint international Smart Actuator Symposium
- Piezoelectric ultrasonic motors are of great interest due to the flexibility of miniaturization in comparison
with conventional electromagnetic motors whose efficiency decreases significantly. Electromagnetic
motors are an obstacle to such miniaturization because of their complicated structure and high power
consumption. Especially in information devices and medical equipments, compact size of these motors
makes them find wider application. Moreover, a direct drive and holding torque contribute a smart system
that has no reduction gearbox and no brake mechanism.
In this presentation, two types of the micro piezoelectric motors will be introduced. One is a multilayer
piezoelectric linear actuator for reducing applying voltage. The motor is a travelling wave type and the
volume of it 5 2 2 mm3. The other is a high speed piezoelectric rotary motor which is operated by
travelling wave. The speed and size of the motor are above 10,000 rpm and 5 5mm2, respectively.
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