Effects of deposition temperature on characteristics of Ga-doped ZnO film prepared by highly efficient cylindrical rotating magnetron sputtering for organic solar cells

Title
Effects of deposition temperature on characteristics of Ga-doped ZnO film prepared by highly efficient cylindrical rotating magnetron sputtering for organic solar cells
Authors
박준혁안경준나석인김한기
Keywords
Ga-doped ZnO; Cylindrical rotating magnetron sputtering; Organic solar cells; Transparent conducting electrodes; Transmittance
Issue Date
2011-02
Publisher
Solar energy materials and solar cells
Citation
VOL 95, NO 2, 657-663
Abstract
We report the characteristics of Ga-doped zinc oxide (GZO) films prepared by a highly efficient cylindrical rotating magnetron sputtering (CRMS) system as a function of substrate temperature for use as a transparent conducting electrode in bulk hetero-junction organic solar cells (OSCs). Using a rotating cylindrical GZO target, low sheet resistance (~11.67 Ω/square) and highly transparent (90%) GZO films were deposited with high usage (~80%) of the cylindrical GZO target. High usage of the cylindrical GZO target in the CRMS system indicates that CRMS is a promising deposition technique to prepare costefficient GZO electrodes for low cost OSCs. Resistivity and optical transmittance of the CRMS-grown GZO film were mainly affected by substrate temperature because the grain size and activation of the Ga dopant were critically dependent on the substrate temperature. In addition, the performance of OSC fabricated on GZO electrode sputtered at 230 ℃ (11.67 Ω/square) is better than OSC fabricated on asdeposited GZO electrode (29.20 Ω/square). OSCs fabricated on the GZO electrode sputtered at 230 ℃ showed an open circuit voltage of 0.558 V, short circuit current of 8.987 m A/㎠, fill factor of 0.628 and power conversion efficiency of 3.149%.
URI
http://pubs.kist.re.kr/handle/201004/39246
ISSN
0927-0248
Appears in Collections:
KIST Publication > Article
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