Mechanism of the Sensitivity Enhancement in TiO2 Hollow-Hemisphere Gas Sensors

Title
Mechanism of the Sensitivity Enhancement in TiO2 Hollow-Hemisphere Gas Sensors
Authors
문희규장호원김진상박형호윤석진
Keywords
TiO2; gas sensors; hollow hemispheres; surface area; sensitivity; CO
Issue Date
2010-12
Publisher
Electronic materials letters
Citation
VOL 6, NO 4, 135-139
Abstract
We investigate the mechanism of the sensitivity enhancement in TiO2 hollow-hemisphere gas sensors. Using monolayer close-packed polystyrene microspheres as a sacrificial template, a TiO2 thin film based on a network of ordered hollow hemispheres is formed by room-temperature sputtering deposition and subsequent calcination at 550°C. A thin film gas sensor based on the TiO2 hollow hemispheres exhibits a 225% change in its resistance when exposed to 50 ppm CO at 250°C, whereas a gas sensor based on a flat TiO2 film shows an 85% change. Numerical analysis reveals that the enhancement of the gas sensitivity in the hollow-hemisphere gas sensor is simply the result of an increase in the effective surface area for the adsorption of gas molecules.
URI
http://pubs.kist.re.kr/handle/201004/39250
ISSN
1738-8090
Appears in Collections:
KIST Publication > Article
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