Surface Modification of Fluorocarbon Thin Films Deposited by Pulsed-Plasma
- Surface Modification of Fluorocarbon Thin Films Deposited by Pulsed-Plasma
- 이지혜; 김강진; 이연희
- Plasma polymerization; Pulsed Plasma
- Issue Date
- The plasma polymerization of fluorocarbon/acetylene mixtures was performed to produce a hydrophobic film on a substrate. Fluorine-containing hydrophobic thin films were obtained by pulsed plasma (PP) and three kinds of fluorine-containing gases such as C2F6, C3F8, and c-C4F8 were used. Process parameters for plasma polymerization such as gas ratio, gas pressure, pulse frequency, and processing time were investigated. Especially, we focused on hydrophobicity improvement of film surface as a function of gas ratio. Surface analytical instruments such as TOF-SIMS, XPS, and AFM were used to characterize the fluorocarbon thin films generated by PP. TOF-SIMS was used to provide useful information about the chemical properties including surface composition and XPS was used to examine the chemical structure of the fluorocarbon films. And, film thickness and surface morphology were also observed by using FE-SEM, profiler meter and AFM.
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