Deposition of Nanocrystalline Bi2Te3 Films Using a Modified MOCVD System

Title
Deposition of Nanocrystalline Bi2Te3 Films Using a Modified MOCVD System
Authors
유현우배성환김종만김진상박찬
Keywords
MOCVD; Bi2Te3; Thermoelectric; nanocrystallite
Issue Date
2011-05
Publisher
Journal of electronic materials
Citation
VOL 40, NO 5, 635-640
Abstract
Nanocrystalline Bi2Te3 films were deposited on (100) GaAs substrates using a modified metalorganic chemical vapor deposition (MOCVD) system, and the effect of growth parameters on the structural properties were investigated. The modified MOCVD system employed a mixing room for the formation of nanoparticles of Bi2Te3 by gas-phase reaction and a graphite susceptor for growth of nanoparticles on the substrate. The grown films contained many crystallites of nanosize, and large crystallites consisted of small particles a few tens of nanometer in size. This nanostructured film approach can be an economical way of producing high-performance thermoelectric films with nanostructure compared with other top-down methods.
URI
http://pubs.kist.re.kr/handle/201004/39653
ISSN
0361-5235
Appears in Collections:
KIST Publication > Article
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