Substrate biasing effect during MgO deposition in CoFeB/MgO/CoFeB MTJs

Title
Substrate biasing effect during MgO deposition in CoFeB/MgO/CoFeB MTJs
Authors
최경민신경호서순애김선옥임우창이택동
Keywords
magnetic tunnel junction; tunnel magnetoresistance; substrate biasing
Issue Date
2008-12
Publisher
Asian Magnetics Conference 2008
Abstract
TMR has increased and RA decreased by substrate biasing especially at the longer T-S distance and larger Ar pressure. These improved TMR properties are caused by the enhanced MgO (001) growth quality through Ar ion bombardments.
URI
http://pubs.kist.re.kr/handle/201004/39664
Appears in Collections:
KIST Publication > Conference Paper
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