Compensation of periodic nonlinearity of heterodyne interferometer using a constant-phase control scheme

Title
Compensation of periodic nonlinearity of heterodyne interferometer using a constant-phase control scheme
Authors
박영규박준규최희덕윤승현조규만
Keywords
heterodyne interferometer; periodic nonlinearity; phase locking
Issue Date
2011-05
Publisher
ALTA 2011
Abstract
Precision of displacement measurements in laser interferometers is limited by periodic nonlinearities that are due to various optical and electronic leakages. We report a simple and real-time method for removing periodic nonlinearities of heterodyne interferometer using a constant-phase control scheme based on a proportional–integral–derivative-controlled piezoelectric transducer. Here we demonstrate the periodic nonlinearities compensation scheme experimentally and show that there is no detectable periodic nonlinearity for the heterodyne interferometer to the noise level of 0.05nm.
URI
http://pubs.kist.re.kr/handle/201004/39755
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KIST Publication > Conference Paper
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