Compensation of periodic nonlinearity of heterodyne interferometer using a constant-phase control scheme
- Compensation of periodic nonlinearity of heterodyne interferometer using a constant-phase control scheme
- 박영규; 박준규; 최희덕; 윤승현; 조규만
- heterodyne interferometer; periodic nonlinearity; phase locking
- Issue Date
- ALTA 2011
- Precision of displacement measurements in laser interferometers is limited by periodic nonlinearities that are due to various optical and electronic leakages. We report a simple and real-time method for removing periodic nonlinearities of heterodyne interferometer using a constant-phase control scheme based on a proportional–integral–derivative-controlled piezoelectric transducer. Here we demonstrate the periodic nonlinearities compensation scheme experimentally and show that there is no detectable periodic nonlinearity for the heterodyne interferometer to the noise level of 0.05nm.
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