Analysis of Randomly Spaced Quantum Dots with Oxide Overlayers Using Spectroscopic Ellipsometry

Title
Analysis of Randomly Spaced Quantum Dots with Oxide Overlayers Using Spectroscopic Ellipsometry
Authors
Jun Seok ByunSeung Ho HanTae Ho GhongYoung Dong KimJin Mo Chung송진동
Keywords
InAs; quantum dots; Ellipsometry; RCWA; Spectroscopic ellipsometry
Issue Date
2011-04
Publisher
Journal of the Korean Physical Society
Citation
VOL 58, NO 4, 943-946
Abstract
Data obtained by spectroscopic ellipsometry (SE) on a random array of oxide-coated InAs quantum dots (QDs) are analyzed by rigorous coupled-wave analysis (RCWA). RWCA is an important method of precisely determining the geometric parameters of patterned periodic structures, but has been applied only rarely to random systems and not previously to a random distribution of QDs covered with an oxide overlayer. We find our model calculations to be in reasonable agreement with data, showing that RCWA is a useful approach for extracting average values of the size, interval, distribution density, shape, and possibly composition of QD structures even when not periodically arranged.
URI
http://pubs.kist.re.kr/handle/201004/39783
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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